A radial line slot antenna (RLSA) 400 mm in diameter is designed for a plasma source at 8.3 GHz as a candidate for a large area high density plasma source with a narrow process space. A RLSA with paired slots arrayed concentrically on its aperture is designed and applied to a plasma process system which does not need a magnetic field. LOW ELECTRON TEMPERATURE MICROWAVE SURFACE-WAVE PLASMA ... A surface wave plasma (SWP) source couples pulsed microwave (MW) energy into a processing chamber through, for example, a radial line slot antenna, to result in a low mean electron energy (T e).To prevent impingement of the microwave energy onto the surface of a substrate when plasma density is low between pulses, an ICP source, such as a helical inductive source, a planar RF coil, or other ... Simulations of the Plasma Structure of a Radial Line ...
Simulation of microwave pulsing in a radial line slot
voltage breakdown of antennas at high altitudes - DTIC Nov 3, 1971 ... Data from measurements made with a plasma caused by a DC discharge over a 380-Mc slot antenna are prosented, illustrating this effect. Ways to improve ...... and Herlin and Brown. 1 In coaxial lines the radial field varies. 21 ... A Circularly Polarized Radial Line Dielectric Resonator Antenna Array The radial line slot antenna (RLSA) is a slotted waveguide planar antenna, which ... [5], which proves feasible in using radial line waveguide to feed the antenna .... Application,” IEEE Transactions on Plasma Science., vol. 43, pp. 3527. - 3529 ... OSA | Generation of vectorial optical fields with slot-antenna-based ...
A radial line slot antenna (RLSA) is a nonresonant multimode waveguide slotted array. To improve the power handing capacity, we design a radial line slow wave structure which replaces a ...
Characteristics of the surface-wave plasma generated by a radial-line slot antenna (RLSA) have been studied by both direct plasma probe measurements and numerical simulations. Some unique characteristics have been found, including excellent critical radial plasma uniformity, low electron temperature under various pressure conditions, the main plasma generation area of RLSA being limited in the ...
Plasma production using rotating mode radial line slot ...
An integrated planar antenna-mixer device for microwave reception utilizes a slot-ring antenna and a diode quad connected thereto. The device comprises a planar metallic sheet backed on one side by a dielectric layer. Advances in Noise Analysis | Mosfet | Field Effect Transistor Figure 7. Vth distributions of p‐Mosfets fabricated by applying (a) conventional plasma processes and (b) radial line slot antenna plasma processes plotted for antenna ratio of 23, 100, 1000, and 10,000. Radioengineering - December 2014, Volume 23, Number 4 Borowiec, R. , Kucharski, A. A. , Slobodzian, P. M. Slot excited dielectric resonator antenna above a cavity analysis and experiment. Mast radiator - Wikipedia
Abstract: The near field distributions in radial line slot antennas (RLSA) for surface wave coupled plasma (SWP) are examined. The RLSA are suitable for uniform, high density and large-area plasma generation. In order to realize higher productivity, quick evacuation of reaction gas a narrow gap process space is highly required.
'HVLJQRI5DGLDO/LQH6ORW$QWHQQDVDW *+]IRU /DUJH ... plasma diffuses into the wafer surface through a wide process space, and uniform density is realized over the entire wafer surface. They cannot be applied to high speed processes for large-diameter-wafers (300 mm), because of the wide process space. A radial line slot antenna (RLSA) is a waveguide planar TEL Release TriasTM SPA Plasma Processing System Capable ... Based on the Radial Line Slot Antenna (RLSA) microwave plasma developed for semiconductor processes by Professor Tadahiro Ohmi at Tohoku University, the Trias SPA uses the unique Slot Plane Antenna (SPA) plasma generating technology established by TEL, after long years of cultivating plasma technology. Radial Line Slot Antenna - Chiba U A radial line slot antenna (RLSA) is a slotted waveguide planar array proposed for DBS subscriber antennas. Predicted conductor loss of RLSA is almost negligible. A single-layered RLSA (SL-RLSA) has the simplest structure.
Research - 東京工業大学 Our research themes are planar slotted waveguide antennas and electromagnetic theory. Plasma Etching. ... collaboration with TOKYO ELECTRON (TEL) SSPS * *SSPS: Space Solar Power System. A Radial Line Slot Antenna Fed by a Rectangular Waveguide through a Crossed Slot (5.8GHz, 23dBi, 300W) collaboration with IHI and Kyoto University. Large-area plasma excitation in densely arrayed radial A novel feeding structure using a TE11 (transverse electric) rotating mode in a radial line slot antenna for plasma production is proposed. Moreover, novel slot patterns with different coupling slot distributions are fabricated and tested. Extremely uniform plasma over a large diameter is observed and the possibility of control of the plasma distribution in the radial direction by changing to